POSSIBLE SPOILERS FOR THOSE WHO HAVE NOT SEEN EPISODE III
So I was watching Episode III yet again while bored at work (I saw most of it today...) and it gave me the idea to do a topic like this. Feel free to do your own list. The order is from Episode I to Episode VI
STAR WARS: EPISODE I - THE PHANTOM MENACEDUEL OF THE FATES
Qui-Gon Jinn and Obi-Wan Kenobi vs. Darth Maul. The music makes this part just awesome. This lightsaber fight still ranks one of the best in the saga despite Episodes II and III attempting to top it. It's also the fight that propels Obi-Wan from a mere Padawan to one of the greatest Jedi Knights.
STAR WARS: EPISODE II - ATTACK OF THE CLONESTHE CLONE WARS BEGIN
The moment Mace Windu appears at the arena on Geonosis and seeing all those lightsabers light up. Previously, no one had seen anything of this magnitude... so many Jedi in one place fighting. And then Yoda arriving in the nick of time with the clonetroopers and the following battle. Great stuff.
STAR WARS: EPISODE III - REVENGE OF THE SITHBATTLE OF CORUSCANT
Right after the main title crawl passes, the sound of war drums. Cut to the star destroyer and the camera following the two Jedi starfighters. Then the money shot. The fighters zip around the top of the destroyer and reveal the massive battle going on below. This is probably the greatest opening scene in a Star Wars movie.
ORDER 66
Starting with the moment Anakin/Vader marches into the Jedi Temple. This is one of the most moving scenes in Star Wars. The music going on during this scene makes it all the more traumatic and the Jedi younglings, all trusting Anakin, get killed by the very man they sought protection from.
BATTLE OF THE HEROES
The mother of all lightsaber fights, the one that put Vader into the suit we're all familiar with. Once again, the music makes it epic. Obi-Wan doesn't want to kill Anakin but knows he has to. And Obi-Wan expressing his disappointment towards Anakin after defeating him, then Anakin's "I hate you!" and his subsequent burning at the hands of the lava on Mustafar.
STAR WARS: EPISODE IV - A NEW HOPEDARTH VADER'S "FIRST" APPEARANCE
Although Episode III shows the suited Darth Vader for the first time in chronological order, this will always remain the essential Vader entrance, especially since this is truly the first Star Wars movie. The star destroyer captures the corvette. After a quick battle on the smaller ship, Darth Vader shows up and the whole audience knows he's evil.
BATTLE OF YAVIN
The Special Edition actually improved this battle greatly. It is one of the greatest space battles ever, especially with the improvements from the Special Edition. The close ups of the X-Wings and TIE Fighters and the feeling like you're really there. And nothing can duplicate the famous trench run. To this day, I still get tense watching that part. The music, the suspense... it gets me on the edge of my seat every time, even though I know what happens. To this day, however, I wonder why Chewbacca never got a medal...
STAR WARS: EPISODE V - THE EMPIRE STRIKES BACKBATTLE OF HOTH
I still get all wowed by the Imperial Walkers. They are some impressive looking vehicles and very menacing. The AT-TEs from Episodes II and III have nothing on the AT-ATs. They just look that awesome. The greatest looking shot in that scene was the one showing the AT-AT's manueverability. Stretching its rear leg out, it takes out a snowspeeder just for the hell of it before destroying the power generator. I'm so glad George Lucas created ILM.
"I AM YOUR FATHER"
Do I even have to explain this one? The line that shocked an entire planet. One of the greatest plot twists in the history of movies. Yeah, definately don't need to explain that one.
STAR WARS: EPISODE VI - RETURN OF THE JEDIBATTLE OF ENDOR
Okay... the best space battle to be put together on the screen... ever. This entry does not include the sorry land battle with the stupid Ewoks. This is about the space battle and Luke's confrontation with the Emperor and Darth Vader. This shows how good the battle is when it used models and no computer generated special effects whatsoever. The fighters swerve all about, passing by massive capital ships. It's amazing how they could put that many ships in a movie using models and no CGI. Once again, the talents of ILM are unsurpassed. Then you have Luke fighting Vader and finally redeeming him. When Vader decides to throw the Emperor over the edge is just great. Greater now with Episode III, showing that Anakin was manipulated into joining the dark side.
If you haven't noticed, a lot of these moments are great because of the music going with it. I don't know where Star Wars would be without the talents of John Williams. There would be no Star Wars Theme, no Imperial March, no Duel of the Fates. Just imagine a world where the Yankees didn't have a theme song (Imperial March

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So, there you have it. Feel free to comment.